请与我们联系,获得有关半导体晶圆加工和集成电路封装应用中显微镜解决方案的专家建议。
半导体晶圆加工、集成电路封装与组件产品

Leica DM2700 M 正置金相显微镜
LED照明技术全面应用于明场,暗场,微分相差干涉,偏光或荧光观察模式,一体化内置式倾斜照明最大程度的提高了表面形貌和缺陷的可视化效果

Leica DM8000 M 工业显微镜
内置一体化的LED照明保证了超长使用寿命和低能耗性,同时宏观检查模式和倾斜紫外光模式(OUV)不仅提高了分辨率还提高了检查 8”/200 毫米直径样品时工作效率。

Leica DM12000 M 工业显微镜
主要用于12”/300 毫米直径样品精密的观察和复检系统。
For very smooth wafer surfaces, interferometric imaging can acquire surface textures with a resolution down to 0.1 nm. The entire scan took less than 3 seconds.
Contrast methods: Images of part of a wafer: a) quick surface overview followed by detection of b) particles with brightfield, c) micro-scratches with darkfield, and d) defects on transparent films with differential interference contrast (DIC). Imaging with each illumination mode is completed in seconds.
View more with less effort, diverse contrast methods and top-notch optics
Our imaging systems allow you to visualize difficult-to-image wafer features more easily to achieve more efficient and accurate wafer inspection and quality control. The image quality in terms of contrast and level of detail easily seen depends strongly on the lighting and optics used.
So choosing the appropriate lighting contrast method and using maximally corrected, high performance optics is imperative. Different wafer and device features, e.g., coatings, contamination, scratches, and defects, are more enhanced with one lighting contrast method compared to another.
High Performance Optics
High quality optics can make your wafer and semiconductor device inspection work more efficient, because you will see the fine details clearly with less effort. Leica Microsystems’ imaging systems use top-performing, award-winning optics which produce distortion free images. Optics can suffer from 2 types of aberration which require correction:
- monochromatic (independent of the light’s wavelength [color]), such as astigmatism, coma, and field curvature
- chromatic (dependent on the light’s wavelength).
Our optical designers and engineers provide optics which enable you to inspect wafers and devices with optimal contrast and resolution.
有兴趣了解更多?
请与我们的专家交流。 我们很乐意回答您的所有问题和疑虑。
联系我们您想获取专人咨询吗?